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Kansas State University

Research Foundation
Kansas State University
2005 Research Park Circle
Suite 105
Manhattan, KS 66502-5020
Tel: 785-532-5720
Fax: 785-532-3920
tech.transfer@k-state.edu

Deep UV and extreme UV MSM, Schottky and p-i-n Photodetectors Based on III-nitrides Grown on Conducting or Insulating Substrates

Reference Number: 07-20

Inventors: Rajendra P. Dahal; Talal Al Tahtamouni; Jingyu Lin; Hongxing Jiang

Background:

Research at Kansas State University (KSU) has produced a new method for fabricating hybrid photodetectors such as deep UV and extreme UV photodetectors. III-nitride materials have extraordinary physical properties such as wide tunable bandgap, high temperature stability, resistant to harsh environment, high mechanical strength and chemical inertness. On the other side, SiC, Si and GaAS are well-established semiconductors with excellent conductivities (both n- and p- type). Therefore, hybrid photodetectors based on III-nitride and SiC, Si and GaAS have excellent characteristics such as low dark current, high breakdown voltage, high detectivity and high responsivity. This method is based on metal-semiconductor-metal Schottky and p-i-n structures that are grown on different substrates.

The performance of UV detectors has steadily improved over the last decade in many respects. Nevertheless, current state-of-the-art photodetectors designed for UV are based on silicon (Si) semiconductors and exhibit major drawbacks that are difficult to overcome within silicon technology. KSU’s wide bandgap UV photodetector does not suffer from the same weaknesses as the Si based photodetectors. The cutoff wavelength of these photodetectors can be tuned from 350 nm down to 200 nm.

Advantages:
  • Capable of working as an avalanche photodiode in both linear and geiger modes
  • Single photon counting
  • Low dark current
  • High breakdown voltage, detectivity and responsivity
  • High temperature stability
  • Resistant to harsh environments

Industrial Applications

  • UV, deep UV (DUV) and extreme UV (EUV) sensors and detectors
  • Radiation detection
  • Photodiode arrays used to make cameras that work in the UV, Deep UV, Extreme UV and soft X-ray spectral range.

Patent Status

  • Provisional patent application filed in June 2007.

Kansas State University Research Foundation seeks to have discussions with companies that are interested in licensing and/or research collaborations.

Interested parties should contact:

National Institute for Strategic Technology Acquisition and Commercialization (NISTAC)
2005 Research Park Circle Manhattan, KS 66502
Tel: 785-532-3900 Fax: 785-532-3909
E-Mail: nistac@ksu.edu