Reference Number: 02-24
Inventors: Hongzing Jiang, Tom Oder and Jingyu Lin
Description:
This invention provides for the fabrication of nitride microlens arrays with sizes as small as 10 µm in diameter. The focal lengths of the microlenses vary from 7 to 30 µm. The surface profiles of the microlenses match very well with hemispherical fitting and surface roundness value of the 1 nm. However, the shape of the lens can be varied to include (but not be limited to) hemispherical and cylindrical shapes, with convex or concave curvatures.
Nitride mirolens arrays would be naturally chosen for green/blue to deep ultraviolet wavelength applications. In addition, nitride microlenses offer the possibility of integrating nitride-based micro-size photonic devices as well as of coupling light into, out of, and between arrays of III-nitride emitters for other applications, such as spatially-resolved fluorescence spectroscopy studies of biological and medical systems and optical links.
Patent Status
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